#NMOS Case go atlas # set Lg=0.2 set Lsd=0.2 set Ldd=0.2 set Tpoly=-0.2 set Tox=-0.003 set Nwell=自行設定 set Nvt=自行設定 set Nldd=自行設定 set Nsd=自行設定 #define Mesh mesh space.mult=1.0 x.mesh loc=0.0 spac=0.10 x.mesh loc=$"Lsd" spac=0.06 x.mesh loc=$"Lsd"+$"Ldd" spac=0.02 x.mesh loc=$"Lsd"+$"Ldd"+($"Lg"*0.5) spac=0.02 x.mesh loc=$"Lsd"+$"Ldd"+($"Lg"*0.5) spac=0.02 x.mesh loc=$"Lsd"+$"Ldd"+$"Lg" spac=0.02 x.mesh loc=$"Lsd"+($"Ldd"*2)+$"Lg" spac=0.06 x.mesh loc=($"Lsd"*2)+($"Ldd"*2)+$"Lg" spac=0.10 y.mesh loc=$"Tpoly" spac=0.004 y.mesh loc=$"Tox" spac=0.001 y.mesh loc=0.0 spac=0.002 y.mesh loc=0.2 spac=0.005 y.mesh loc=0.5 spac=0.05 y.mesh loc=1 spac=0.15 #Define regions REGION number=1 NAME=Silicon y.min=0 material=Silicon REGION number=2 NAME=airr y.max=0 material=air REGION number=3 NAME=Spacer x.min=$"Lsd" x.max=$"Lsd"+($"Ldd"*2)+$"Lg" y.min= $"Tpoly" y.max=0 material=Nitride REGION number=4 NAME=gateoxide x.min=$"Lsd" x.max=$"Lsd"+($"Ldd"*2)+$"Lg" y.min=$"Tox" y.max=0 material=SiO2 REGION number=5 NAME=gatepoly x.min=$"Lsd"+$"Ldd" x.max=$"Lsd"+$"Ldd"+$"Lg" y.min=$"Tpoly" y.max=$"Tox" material=Poly REGION number=6 NAME=alelectrode x.min=0 x.max=$"Lsd" y.min=$"Tpoly" y.max=0 material=Aluminum REGION number=7 NAME=alelectrode x.min=$"Lsd"+$"Ldd"*2+$"Lg" x.max= $"Lsd"*2+$"Ldd"*2+$"Lg" y.min= $"Tpoly" y.max=0 material=Aluminum #Define electrode electrode number=1 name=source x.min=0 x.max=$"Lsd" y.min=$"Tpoly" y.max=0 electrode number=2 name=drain x.min=$"Lsd"+($"Ldd"*2)+$"Lg" x.max=($"Lsd"*2)+($"Ldd"*2)+$"Lg" y.min=$Tpoly y.max=0 electrode number=3 name=gate x.min=$"Lsd"+$"Ldd" x.max=$"Lsd"+$"Ldd"+$"Lg" y.min=$Tpoly y.max=$Tox electrode number=4 name=base Bottom #Define doping # doping uniform conc=$"Nwell" p.type direction=y # doping uniform conc=$"Nvt" p.type x.left=$"Lsd"+$"Ldd" x.right=$"Lsd"+$"Ldd"+$"Lg" y.top=0 y.bottom=0.06 direction=y # doping uniform conc=$"Nldd" n.type x.left=0 x.right=$"Lsd"+$"Ldd" y.top=0 y.bottom=0.04 direction=y # doping uniform conc=$"Nldd" n.type x.left=$"Lsd"+$"Ldd"+$"Lg" x.right= ($"Lsd"*2)+($"Ldd"*2)+$"Lg" y.top=0 y.bottom=0.04 direction=y # doping uniform conc=$"Nsd" n.type x.left=0 x.right=$"Lsd" y.top=0 y.bottom=0.1 direction=y # doping uniform conc=$"Nsd" n.type x.left=$"Lsd"+($"Ldd"*2)+$"Lg" x.right=($"Lsd"*2)+($"Ldd"*2)+$"Lg" y.top=0 y.bottom=0.1 direction=y # save structure SAVE outfile=NMOS.str